1

GB/T 3163-2007

真空技术  术语

Vacuum technology－Terminology

代替

GB/T 3163-1993

2

GB/T 3164-2007

真空技术  图形符号

Vacuum technology－Graphical symbols

代替

GB/T 3164-1993

3

GB/T 4982-2003

真空技术  快卸连接器  尺寸  第1部分：夹紧型

Vacuum technology－Quick release couplings－Dimensions－Part 1:Clamped type

代替

GB/T 4982-1985

4

GB/T 4983-2003

真空技术  快卸连接器  尺寸  第2部分：拧紧型

Vacuum technology－Quick release couplings－Dimensions－Part 2:Screwed type

代替

GB/T 4983-1985

5

GB/T 6070-2007

真空技术  法兰尺寸

Vacuum technology－Flange dimensions

代替

GB/T 6070-1995

6

GB/T 6071-2003

超高真空法兰

Ultra-high vacuum flange

代替

GB/T 6071.1～6071.3-1985

7

GB/T 7774-2007

真空技术  涡轮分子泵性能参数的测量

Vacuum technology－Turbomolecular pumps－Measurement of performance characteristics

代替

GB/T 7774-1987

8

GB/T 11164-2011

真空镀膜设备通用技术条件

Vacuum coating plant generic specification

代替

GB/T 11164-1999

9

GB/T 16709.1-2010

真空技术  管路配件尺寸  第1部分：无刀口法兰型

Vacuum technology－Mounting dimensions of pipeline fittings－Part 1:Non knife-edge flange type

部分代替

GB/T 16709-1996

10

GB/T 16709.2-2010

真空技术  管路配件尺寸  第2部分：刀口法兰型

Vacuum technology－Mounting dimensions of pipeline fittings－Part 2:Knife-edge flange type

部分代替

GB/T 16709-1996

11

GB/T 18193-2000

真空技术  质谱检漏仪校准

Vacuum technology－Mass-spectrometer-type leak detector calibration

12

GB/T 19955.1-2005

蒸汽流真空泵性能测量方法 第1部分：体积流率（抽速）的测量

Vapor vacuum pumps－Measurement of performance characteristics－Part 1:Measurement of volume rate of flow(pumping speed)

13

GB/T 19955.2-2005

蒸汽流真空泵性能测量方法 第2部分：临界前级压力的测量

Vapor vacuum pumps－Measurement of performance characteristics－Part 1:Measurement of critical backing pressure

14

GB/T 19956.1-2005

容积真空泵性能测量方法 第1部分：体积流率（抽速）的测量

Positive-displacement vacuum pumps－Measurement of performance characteristics－Part 1:Measurement of volume rate of flow (pumping speed)

15

GB/T 19956.2-2005

容积真空泵性能测量方法 第2部分：极限压力的测量

Positive-displacement vacuum pumps－Measurement of performance characteristics－Part 1:Measurement of ultimate pressure

16

GB/T 21271-2007

真空技术 真空泵噪声测量

Vacuum technology－Noise measurement for vacuum pumps

17

GB/T 21272-2007

蒸汽流真空泵性能测量方法 泵液返流率和加热时间的测量

Vapour vacuum pumps measurement of performance characteristics－Measurement of back-streaming rate of pump fluid and the heating time

18

GB 22360-2008

真空泵  安全要求

Vacuum pumps－safety requirements

19

GB/T 25752-2010

差压式气密检漏仪

Differential pressure air leak tester

20

GB/T 25753.1-2010

真空技术  罗茨真空泵  第1部分：最大允许压差的测量

Vacuum technology－Roots vacuum pump－Measurement of performance characteristics－Part 1:Measurement of maximum tolerable differential pressure

21

GB/T 25753.2-2010

真空技术  罗茨真空泵  第2部分：零流量压缩比的测量

Vacuum technology－Roots vacuum pump－Measurement of performance characteristics－Part 2:Measurement of compression ratio of the zero throughput

22

GB/T25753.3-2011

真空技术  罗茨真空泵  第3部分：溢流阀压差的测量

Vacuum technology－Roots vacuum pump－Measurement of performance characteristics－Part 3:Measurement of overflow valve differential pressure

23

GB/T 25754-2010

真空技术  直角阀  尺寸和气动装置的接口

Vacuum technology－Right-angle valve－Dimensions and interfaces for pneumatic actuator

24

GB/T 25755-2010

真空技术  溅射离子泵  性能测量方法

Vacuum technology－Sputter-ion pumps－Measurement of performance characteristics

25

GB/Z 25756-2010

真空技术  可烘烤法兰  第2部分：刀口法兰尺寸

Vacuum technology－Bakable flanges－dimensions of knife-edge flanges

26

GB/T 28786-2012

真空技术  真空镀膜层结合强度测量方法  胶带粘贴法

Vacuum technology－Methods of bonding strength measurement for vacuum coating film－Measuring adhesion by tape test